Scientific Optical Spectrometers for VUV, UV, XUV, EUV, and X-Ray Applications
Scientific optical spectrometers are used to measure light intensity and spectral composition across VUV, UV, XUV, EUV, and X-ray wavelength regions. Pembroke Instruments supplies high-performance spectrometers for laboratory research, industrial process monitoring, light-source characterization, materials analysis, plasma diagnostics, and advanced spectroscopy applications.
Use this page to compare compact VUV spectrometers, flat-field XUV spectrometers, high-resolution XUV spectrometers, monochromator options, and X-ray absorption spectroscopy systems. For compact UV-VIS-NIR spectroscopy, visit the Avenir compact spectrometers page. For use-case guidance, see high-energy spectrometer applications.
Find the Right Spectrometer Platform
Pembroke Instruments helps engineers and researchers select the right spectrometer by matching spectral range, source geometry, light collection efficiency, detector format, vacuum requirements, control interface, and customization needs to the application.
VUV Spectroscopy
For measurements in the 80-300 nm region, including compact spectrograph and monochromator configurations.
View VUV options →XUV and EUV Spectroscopy
For high-efficiency flat-field measurements, EUV source qualification, plasma diagnostics, and broadband spectral characterization.
View XUV/EUV options →High Resolution
For experiments requiring narrow spectral features, higher resolving power, or advanced flat-field performance.
View highLIGHT →X-Ray Absorption
For integrated XAS and NEXAFS systems used in oxidation-state, local bonding, and materials research.
View XAS options →Featured Spectrometer: maxLIGHT-pro-XUV
maxLIGHT-pro-XUV is a high-efficiency flat-field XUV spectrometer and beam profiler designed for maximum light collection and high system efficiency. It combines a spectrometer and integrated beam profiler, making it a complete characterization tool for XUV source development and advanced laboratory spectroscopy.
The platform supports wide flat-field spectral coverage from approximately 1-200 nm with automated switching of spectral regions.
Download maxLIGHT-pro Datasheet →Spectrometer Model Table
The table below provides a practical comparison of high-performance spectrometer platforms, product images, spectral ranges, best-fit uses, datasheet links, and high-energy spectrometer application information.
| Spectrometer Platform | Product Image | Description | Spectral Range | Best-Fit Applications | Data Sheet | Application Link |
|---|---|---|---|---|---|---|
| easy-LIGHT-VUV | ![]() |
easyLIGHT VUV compact VUV spectrometer. Versatile spectrometer covering the 80-300 nm spectral range with optional monochromator mode, high grating efficiency, closed-loop grating positioning, and integrated stray light suppression. | 80-300 nm | VUV spectroscopy, laboratory source characterization, UV materials analysis, monochromator-based measurements. | easyLIGHT-VUV datasheet | Applications |
| max-LIGHT-VUV / maxLIGHT-pro | ![]() |
maxLIGHT pro VUV high-efficiency flat-field spectrometer and beam profiler. Combines a high-efficiency spectrometer with beam profiling, automated switching, and extension options for shorter XUV wavelengths. | 1-200 nm | High-efficiency VUV/XUV source characterization, plasma diagnostics, EUV source development, beam profiling. | maxLIGHT-pro VUV/XUV datasheet | Applications |
| maxLIGHT-pro-XUV | ![]() |
High-efficiency flat-field XUV spectrometer and beam profiler. Designed for maximum light collection, high system efficiency, wide flat-field coverage, and automated spectral-region switching. | 1-200 nm | XUV/EUV spectroscopy, high-harmonic generation, laboratory XUV sources, source alignment and beam profiling. | maxLIGHT-pro-XUV datasheet | Applications |
| easy-LIGHT-XUV | ![]() |
Compact high-efficiency flat-field XUV spectrometer. Flat-field coverage of 30-250 nm in no-slit configuration for up to approximately 20x higher efficiency, with integrated stray light suppression. | 30-250 nm | Broadband XUV/VUV spectral measurements, compact lab systems, source qualification, EUV spectral monitoring. | easyLIGHT-XUV datasheet | Applications |
| highLIGHT-XUV | ![]() |
High-resolution flat-field XUV spectrometer. Designed for high spectral resolution with wide spectral bandwidth and selectable high-efficiency no-slit or conventional entrance slit modes. | 1-100 nm | High-resolution XUV spectroscopy, narrow spectral-feature analysis, advanced physics experiments, source diagnostics. | highLIGHT-XUV datasheet | Applications |
| easy-LIGHT-MONO | ![]() |
Compact VUV monochromator and spectrometer. Easy-to-use monochromator for the 80-300 nm spectral range, with excellent wavelength accuracy, high efficiency, and manual or motorized slit control. | On request | VUV monochromator work, wavelength selection, laboratory source testing, UV optics and materials evaluation. | Request configuration | Applications |
| mono-LIGHT | ![]() |
Toroidal grating monochromator. Monochromator for laboratory VUV sources with toroidal grating, high efficiency, compact footprint, and manual or motorized versions. | On request | VUV source measurements, monochromator-based experiments, lab spectroscopy setups requiring flexible configuration. | Request configuration | Applications |
| XAS / proXAS | ![]() |
Integrated X-ray absorption spectroscopy systems. Suitable for near-edge and extended energy regions of an absorption edge. NEXAFS measurements can support analysis of local atomic states and oxidation states. | 200-1200 eV / 1-6 nm | NEXAFS, X-ray absorption spectroscopy, materials analysis, chemical-state and oxidation-state studies. | XAS / proXAS datasheet | Applications |
Featured Spectrometers

maxLIGHT-pro-XUV
High-efficiency no-slit flat-field XUV spectrometer and beam profiler for source characterization and advanced laboratory spectroscopy.
Datasheet →Applications →

easyLIGHT-XUV
Compact high-efficiency flat-field XUV spectrometer for broadband XUV/VUV measurements.
Datasheet →Applications →

easyLIGHT-VUV
Compact VUV spectrometer with spectrograph and monochromator functionality for the 80-300 nm region.
Datasheet →Applications →

XAS / proXAS
Integrated X-ray absorption spectroscopy platform for NEXAFS and X-ray materials analysis.
Datasheet →Applications →
High-Performance Spectrometer Platform Details
maxLIGHT-pro-XUV Spectrometer
The maxLIGHT pro combines high-performance flat-field spectrometer functionality with a beam profiler. Automated switching between spectrograph and profiler modes supports routine verification of beam properties. The system covers approximately 1-200 nm using aberration-corrected flat-field optics and multiple grating ranges.
See related applications →easyLIGHT-XUV Spectrometer
The easyLIGHT XUV spectrograph provides aberration-corrected wavelength coverage in the extreme and vacuum ultraviolet regions. The high-efficiency flat-field grating supports wide-band spectral measurements covering approximately 30-200 nm, and the no-slit configuration can maximize light collection.
See related applications →easyLIGHT VUV Spectrometer
The easyLIGHT VUV spectrograph provides spectrograph and monochromator functionality in the vacuum ultraviolet region. High-efficiency gratings and closed-loop positioning provide accurate wavelength selection, with manual or optional motorized slit control.
See related applications →X-Ray Absorption Spectroscopy
Integrated XAS systems support near-edge and extended absorption-edge measurements. NEXAFS can be used to evaluate variations in X-ray absorption coefficient, chemical state, local atomic environment, and oxidation-state related information.
See related applications →Applications and Publications
High-performance VUV, XUV, EUV, and X-ray spectrometers support source qualification, spectroscopy research, absorption-edge analysis, and detector-based experiments. The examples below preserve the application imagery and supporting publication links from the original page.

NEXAFS Spectroscopy
Near-edge X-ray absorption fine structure spectroscopy for studying electronic states and absorption-edge structure.
View application page →Example publication →

Qualification of EUV Light Sources
Measurement and characterization of EUV light sources for source development and laboratory qualification.
View application page →Example publication →

XUV / VUV Spectroscopy
Broadband spectroscopy in short-wavelength regimes, often paired with sensitive scientific CCD detection.
View application page →Example publication →

LEED Imaging
Low-energy electron diffraction applications for surface-science experiments and diffraction imaging.
View application page →LEED technical overview →
Talk to Pembroke About Your Spectrometer Application
Choosing a spectrometer for VUV, XUV, EUV, or X-ray work often depends on source geometry, wavelength range, vacuum compatibility, detector selection, and required signal-to-noise performance. Pembroke Instruments can help compare standard platforms or request a customized configuration.
Contact Pembroke →
