maxLIGHT XUV/VUV/EUV Spectrometers

  • high-efficiency spectrometer
  • flat-field grazing-incidence spectrometer

  • highest efficiency due to proprietary no-slit design

  • wavelength range from 1 to 200 nm

  • integrated beamprofiler

  • modular, turn-key design

maxLIGHT XUV Spectrometer Datasheet


maxLIGHT XUV Spectrometer Datasheet

maxLIGHT offers maximum light collection and the highest efficiency in the industry due to its no-slit design. Aberration-corrected flat-field wavelength coverage spans 1nm to 200nm with extensive spectral bandwidths, e. g. 5-80nm per individual grating.​

The modular design matches a variety of experimental geometries and configurations. maxLIGHT features an integrated slit holder and filter insertion unit, as well as a motorized grating positioning.



  • High-harmonic generation sources

  • Attosecond science

  • Intense laser-matter interaction

  • Free-electron lasers

  • Laser and discharge produced plasma sources

  • X-ray lasers

  • Laser driven secondary sources