High Resolution XUV/VUV Spectrometers

Highest spectral resolution available in a flat-field XUV spectrometer. Wide spectral bandwidth of 1-100 nm. Two modes of operation: high-efficiency no-slit and conventional entrance slit mode.

highLIGHT Spectrometer Datasheet 

highLIGHT XUV spectrometer


The high-resolution spectrograph features an aberration-corrected flat-field configuration for wide wavelength coverage, while reaching a resolution of 0.006nm or higher at the same time. The spectrometer can be used with or without entrance slit. The modular design features an integrated slit holder and filter insertion unit, as well as a motorized grating positioning.

Our goal is to supply the perfect spectrometer for your application. We customize every spectrometer to exactly match the desired application. Options include:

  • interfacing to vacuum chamber

  • adaption of source distance

  • integration of customer-supplied detectors

  • user-defined filter mounts

Main Features


  • flat-field grazing-incidence spectrograph

  • proprietary H+P design for direct source imaging and maximum light collection

  • fixed or variable entrance slit

  • resolution <0.006nm at 40nm

  • wavelength coverage 1-100nm, configurable wavelength selection​

  • operating pressure <10^-6 mbar

  • turn-key, intuitive operation

Light Detection Options

Our spectrometers can be operated with all state-of-the-art detection systems:

  • x-ray CCD cameras for highest resolution, large dynamic range and absolute signal strength

  • large-area MCPs for broadest wavelength coverage and gated / intensified detection

We will select and supply the detector that best fits your application



  • high harmonic generation (HHG) radiation

  • high intensity laser-matter interaction

  • undulator and free-electron-laser (FEL) radiation

  • magnetically confined plasmas

  • fusion research

  • characterization of line-emission sources

  • EUV source calibration