Spectrometers for X-Ray/XUV/VUV/EUV Spectroscopy

Our H+P spectrometer platform includes many configurations spanning the X-Ray, XUV, EUV, and VUV regions. Many standard configurations are available and we also can quote customized spectrometers.

Spectrometer Model Table
Featured Spectrometers
Application papers
Request Quote or Support

Featured Spectrometer: maxLIGHT-pro-XUV

High-efficiency flat-field XUV spectrometer and beamprofiler. Maximum light collection and highest system efficiency. Available in an XUV spectrometer. The integrated beam profiler makes it a complete characterization tool for any XUV source. Wide flat-field coverage in 1-200nm and automated switching.

maxLIGHT-pro data sheet

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The spectrometer table below provides a quick comparison of key performance features and a link to the complete data sheet.

Spectrometer PlatformProduct ImageDescriptionSpectral RangeData Sheet Link
easy-LIGHT-VUVeasyLIGHT-VUV easyLIGHT VUV

compact VUV spectrometer

Versatile spectrometer covering 80-300nm spectral range with optional monochromator mode.

Best-in-class grating efficiency. Closed-loop grating positioning provides excellent wavelength accuracy. Integrated stray light suppression.
80-300 nmeasyLIGHT-VUV
max-LIGHT-VUVmaxLIGHT-VUVmaxLIGHT pro VUV

high-efficiency flat-field VUV spectrometer and beamprofiler

A complete characterization tool for any VUV source, combining
a high-efficiency spectrometer for 40-200nm and a beamprofiler.
Automated switching of spectral region and plug-and-play
extension options to shorter XUV wavelengths give increased
flexibility in the lab.

compact VUV spectrometer

Versatile spectrometer covering 80-300nm spectral range with optional monochromator mode.

Best-in-class grating efficiency. Closed-loop grating positioning provides excellent wavelength accuracy. Integrated stray light suppression.
1-200 nmmaxLIGHT-pro-VUV-XUV
maxLIGHT-pro-XUVeasyLIGHT-XUVmaxLIGHT pro
high-efficiency flat-field XUV spectrometer and beamprofiler

Maximum light collection and highest system efficiency

available in an XUV spectrometer. The integrated beamprofiler

makes it a complete characterization tool for any XUV source.

Wide flat-field coverage in 1-200nm and automated switching

of spectral region increase lab efficiency substantially
1-200 nmmaxLIGHT-pro-VUV-XUV
easy-LIGHT-XUVeasyLIGHT-XUVeasyLIGHT XUV
compact high-efficiency flat-field XUV spectrometer

Flat-field spectral coverage of 30-250nm in no-slit configuration for up to 20-times higher efficiency. Compact device covering a broadband spectral range. Integrated stray light suppression for increased signal-to-noise.
30-250 nmeasyLIGHT-XUV
highLIGHT-XUVeasyLIGHT-XUVhighLIGHT
high-resolution flat-field XUV spectrometer

Highest spectral resolution available in a flat-field XUV spectrometer. Wide spectral bandwidth of 1-20nm, resp. 5-100nm. Two modes of operation: high-efficiency no-slit and conventional entrance slit mode.
1-100 nmhiLIGHT-XUV
easy-LIGHT-MONOeasyLIGHT-XUVeasyLIGHT VUV

compact VUV monochromator and spectrometer



Easy-to-use monochromator for 80-300nm spectral range. Excellent wavelength accuracy by closed-loop positioner. Best-in-class efficiency. Slit control manually or motorized. Compact and flexible footprint.
ON REQUEST
mono-LIGHTeasyLIGHT-XUVmonoLIGHT

toroidal grating monochromator



Monochromator for laboratory VUV sources. Toroidal grating with high efficiency. Standard version for He spectral lines. Highly stable and compact footprint. Manual and motorized versions.
ON REQUEST
XASeasyLIGHT-XUVOur product portfolio includes integrated XAS systems both for near and extended energy regions of an absorption edge.
The NEXAFS region close to the absorption edge shows the largest variations in the x-ray absorption coefficient and is often dominated by intense, narrow resonances caused by the transition of core electrons to non-bound levels. NEXAFS is sensitive to local atomic states such as oxidation states.
200-1200eV / 1-6nmXAS-X-Ray Spectroscopy

maxLIGHT-pro-XUV Spectrometer

Our maxLIGHT pro offers the high-performance spectrometer functionality of the maxLIGHT combined with a straightforward beam profiler. Automated and quick switching between spectrograph and profiler modes allows for routine verification of beam properties.
The spectrograph features aberration-corrected flat-field wavelength coverage from 1nm to 200nm. Wide-band spectral measurements are possible by three gratings covering 1-20nm, 5-80nm, and 40-200nm. The spectrometer can be used without entrance slit to maximize light collection for a range of source distances.

easyLIGHT-XUV Spectrometer

Our easyLIGHT XUV spectrograph provides aberration-corrected wavelength coverage in the extreme and vacuum ultraviolet spectral region. Based on a normal-incidence geometry, the high-efficiency flat-field grating provides wide-band spectral measurements covering 30 to 200nm. The spectrometer can be used without entrance slit to maximize light collection for a range of source distances.

easyLIGHT VUV Spectrometer

Our easyLIGHT spectrograph provides aberration-corrected wavelength coverage in the vacuum ultraviolet spectral region. Based on a normal-incidence geometry, it offers spectrograph and monochromator functionality. The high-efficiency gratings can be rotated about their apexes by a high-accuracy positioning system, resulting in a wavelength selection accuracy at the exit slit of <0.1 nm. Entrance and exit slit widths can be set in the range of 0.01 to 4 mm by micrometer screws or a motorized actuator (optional).

X-Ray Absorbance Spectroscopy (XAS)

Our product portfolio includes integrated XAS systems both for near and extended energy regions of an absorption edge.The NEXAFS region close to the absorption edge shows the largest variations in the x-ray absorption coefficient and is often dominated by intense, narrow resonances caused by the transition of core electrons to non-bound levels. NEXAFS is sensitive to local atomic states such as oxidation states.

Applications and Publications

NEXAFS Spectroscopy
[ near-edge X-ray absorption fine structure]

Qualification of EUV Light Sources

XUV/VUV Spectroscopy

LEED [Low Energy Electron Diffraction]
Near Infrared Imaging

This application maps to the ALEX series with back-illuminated CCD sensors.

Upload example peer reviewed scientific publication

This application maps to the ALEX or LOTTE series.

Upload example independent publication.

This application maps to the ALEX or LOTTE series.

Upload example independent publication

Access LEED technical discussion for more information.