We offer Avantes integrated spectroscopy solutions for thin film metrology , plasma diagnostics, and process monitoring applications where in-situ or in-vacuodiagnostic capabilities are required. Avantes fiber optic based spectrometers have a proven track record with metrology and process applications. with > 6000 installed units and 14 years experience. Avantes spectroscopy solutions have exceptional capability at very affordable prices. New turn-key Raman spectroscopy systems are now available.

Spectroscopy Solutions-Thin Film Metrology

Thin film thickness measurements are critical in the semiconductor industry where plasma etching and deposition processes need to be closely monitored. Other supported applications where thickness is monitored includes the deposition of transparent coatings on glass and metal substrates. The Avantes thin film measurement solutions are based on white light optical interference measurementstodetermine film thickness. Physical thickness is determined by mathematiclmodeling of the intereferncepatterns for materials of know n and k values. The AvaSoftThin Film software available that support Avantes thin film solutions have a built-in database for most common materials and coatings. The Avantes Thin Film solution can measure physical thickness from 10 nm to 50 um with a resolution of 1 nm'; these solutions offer exceptional price/performance and are very easy to implement in your process.
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Spectroscopy Solutions:In-Situ Diagnostics

Enable your chemical sensing or process monitoring application which may be taking place in a harsh environment or in a high vacuum chamber. Avantes light sources, fiber optic probes, and spectrometer solutions are designed facilitate bringing light to thesample or provcesand extracting the spectral signature with high signal to noise ratio.

AvaLight Series

Fiber Optic Probes

Spectroscopy Solutions-Raman Systems

Raman spectroscopy is the ultimate spectroscopic method where minimum sample preparation and speedy analysis are key requirements for the application. Raman is also preferred when sample light absorption or water interference precludes the use of traditional absorbance, reflectance, and transmission spectroscopic methods. Avantes has applied its core technologies and manufacturing experience to significantly reduce the cost of Raman systems and provide a n out-of-box solution that is easy to use. Raman systems with laser excitation wavelengths at 532 nm and 785 nm are supported. The Avantes Raman product family allows wide selection of spectrometers and detectors to provide exact mapping to your application requirements at minimum cost.
Download AvaRaman product manual for full technical details